Method and apparatus for verifying microcircuit fabrication...

Details Method and apparatus for verifying microcircuit fabrication... Method and apparatus for verifying microcircuit fabrication...

G - Physics

01

R

356/117

G01R 31/26 (2006.01) H01L 27/02 (2006.01)

Patent

CA 2033472

METHOD AND APPARATUS FOR VERIFYING MICROCIRCUIT FABRICATION PROCEDURE ABSTRACT OF THE DISCLOSURE An apparatus is used to perform a fabrication proce- dure on a microcircuit under control of specification data. The procedure may include making relatively undetectable modifications to the microcircuit using a focussed ion beam to deter unauthorized reproduction and/or use of the microcircuit. The output of the apparatus is tapped to generate record data of the signals actually applied to control the focussed ion beam to perform the procedure. The record data is written into at least one verification data storage area of the microcircuit, preferably using the focussed ion beam. During testing of the microcircuit, the data written into the storage area is read out and compared with the specification data and generated record data. Proper performance of the procedure is verified if the compared data correspond to each other.

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