Substrate anchor for undercut silicon on insulator...

Details Substrate anchor for undercut silicon on insulator... Substrate anchor for undercut silicon on insulator...

H - Electricity

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H01L 21/306 (2006.01) G01P 15/08 (2006.01) G01P 15/125 (2006.01) H01L 21/465 (2006.01) H01L 21/64 (2006.01) H01L 49/00 (2006.01)

Patent

CA 2190614

An accelerometer is fabricated by forming a proofmass and at least one associated hinge in a silicon substrate. The method includes a bond and etchback process in which an anchor (646) is formed, for bridging the silicon substrate (606) to an oxide support substrate (626), using a selective epitaxy or non-selective epitaxy process to grow the polysilicon anchors.

Un accéléromètre est fabriqué en formant une masse étalon et au moins une articulation associée dans un substrat en silicium. Le procédé consiste à utiliser un processus de liaison et gravure en retrait permettant de former un élément d'ancrage (646) afin d'établir un pont entre le substrat de silicium (606) et un substrat de support d'oxyde (626), en appliquant un procédé d'épitaxy sélective ou d'épitaxy non sélective pour la croissance des éléments d'ancrage de polysilicium.

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