H - Electricity – 01 – L
Patent
H - Electricity
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L
H01L 31/0256 (2006.01) G01T 1/20 (2006.01) H01L 31/0232 (2006.01) H01L 31/20 (2006.01)
Patent
CA 2114539
2114539 9303496 PCTABS00019 Method and apparatus (11) for producting separated columns (19) of scintillation layer material (18), for use in detection of X-rays and high energy charged particles (23), with improved spatial resolution. A pattern of ridges or projections (16) is formed on one surface of a substrate layer or in a thin polyamide layer (15), and the scintillation layer (18) is grown at controlled temperature and growth rate on the ridge-containing material (16). The scintillation material (18) preferentially forms cylinders or columns (19), separated by gaps (20) conforming to the pattern of ridges (16), and these columns (19) direct most of the light produced in the scintillation layer (18) along individual columns (19) for subsequent detection in a photodiode layer (13). The gaps (20) may be filled with a light-absorbing material to further enhance the spatial resolution of the particle detector.
Smart & Biggar
The Regents Of The University Of California
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