Cluster tool for wafer processing having an electron beam...

Details Cluster tool for wafer processing having an electron beam... Cluster tool for wafer processing having an electron beam...

H - Electricity

01

L

H01L 21/00 (2006.01)

Patent

CA 2367204

A wafer processing cluster tool, having one or more electron beam exposure modules receives wafers from the tool transport mechanism at the in- ternal vaccum pressure of the machine. The load- ing, unloading, handling and processing of wafers in the machine can occur while other wafers are being treated. The cluster tool has a transport mod- ule enclosing an internal volume continuously main- tainable under vacuum, a plurality of ports and a wafer transport mechanism for selectively transfer- ring wafers among processing modules. The pro- cessing modules perform wafer processing therein under vacuum. At least one semiconductor wafer processing module is an electron beam radiation module. The tool further has a loading module and an unloading module attached to the transport mod- ule which are capable of inserting and removing wafers into and out of the transport module from an external environment.

Cette invention concerne un outil combiné pour traitement de tranches comportant un ou plusieurs modules d'exposition à un faisceau d'électrons. Cet outil reçoit des tranches à partir d'un mécanisme de transport sous vide. Le chargement, le déchargement, la manipulation et le traitement des tranches peuvent se faire en même temps que le traitement d'autres tranches. L'outil combiné comporte un module de transport définissant un volume interne constamment maintenu sous vide, une pluralité de passages et un mécanisme de transport des tranches permettant d'acheminer sélectivement des tranches entre modules de traitement. Le traitement des tranches par ces modules a lieu sous vide. Au moins un des modules de traitement des tranches de semi-conducteurs est un module d'irradiation par faisceau d'électrons. De plus, l'outil comporte un module de chargement et un module de déchargement, reliés au module de transport, qui peuvent insérer des tranches dans le module de transport et les en retirer à partir de l'extérieur.

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