C - Chemistry – Metallurgy – 30 – B
Patent
C - Chemistry, Metallurgy
30
B
C30B 29/38 (2006.01) C30B 23/02 (2006.01)
Patent
CA 2759530
A manufacturing device of an aluminum nitride single crystal includes a crucible. An aluminum nitride raw material and a seed crystal are stored in an inner portion of the crucible. The seed crystal is placed so as to face the aluminum nitride raw material. The crucible includes an inner crucible and an outer crucible. The inner crucible stores the aluminum nitride raw material and the seed crystal inside the inner crucible. The inner crucible is also corrosion resistant to a sublimation gas of the aluminum nitride raw material. The inner crucible includes either, a single body of a metal having an ion radius larger than an ion radius of an aluminum, or includes a nitride of the metal. The outer crucible includes a boron nitride. The outer crucible covers the inner crucible.
L'invention concerne un appareil de fabrication d'un monocristal de nitrure d'aluminium équipé d'un creuset contenant une matière première de nitrure d'aluminium et un cristal germe disposé de façon à regarder la matière brute de nitrure d'aluminium. Le creuset est composé d'un creuset interne, qui contient à l'intérieur de la matière brute de nitrure d'aluminium et le cristal germe, il est anti-corrosif au gaz sublimé de la matière brute de nitrure d'aluminium et est formé d'un métal ayant un rayon ionique supérieur à celui de l'aluminium ou d'un nitrure de ce métal; et un creuset externe couvrant le creuset interne et à base de nitrure de bore.
Kamata Hiroyuki
Katou Tomohisa
Miura Tomonori
Nagai Ichirou
Bcf Llp
Ltd. Fujikura
National Institute Of Advanced Industrial Science And Technology
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