Method and apparatus for co-ordinate measuring using a...

Details Method and apparatus for co-ordinate measuring using a... Method and apparatus for co-ordinate measuring using a...

G - Physics

01

B

G01B 7/14 (2006.01) G01B 7/004 (2006.01) G01B 7/28 (2006.01) G01R 27/26 (2006.01)

Patent

CA 2090978

2090978 9204593 PCTABS00011 The surface parameters and characteristics of a conductive workpiece (30) are determined by applying a voltage between the workpiece (30) and a capacitance probe (10) having proximity sensing capabilities, and moving the probe (10) in two or three co-ordinate axes relative to the workpiece (30) while measuring the capacitance between the probe (10) and workpiece (30), and controlling the probe velocity and/or direction within a stand-off band adjacent to the workpiece as a function of the capacitance value measured for purposes of effecting significant real time process controls, and determining the workpiece surface parameters as a function of the probe movement and capacitance measured.

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