Mems actuator device with integrated temperature sensors

Details Mems actuator device with integrated temperature sensors Mems actuator device with integrated temperature sensors

G - Physics

01

Q

G01Q 70/16 (2010.01) G01Q 10/00 (2010.01) G01Q 10/04 (2010.01) B82Y 15/00 (2011.01) B81B 7/02 (2006.01) G12B 1/02 (2006.01) B82B 3/00 (2006.01)

Patent

CA 2682844

An electro-thermal actuator which includes a unit cell comprising at least one thermal bimorph, the thermal bimorph comprising at least two materials of different thermal expansion coefficient bonded together, the unit cell having a first end and a second end; and at least one temperature sensor located on the at least one thermal bimorph for measuring a temperature of the at least one thermal bimorph and determining a position of the unit cell. The basic structure can be expanded to 1-D, 2-D and 3-D positioners. The bimorphs can also be coupled to an active yoke which is in turn anchored to a plate, in order to reduce the parasitic heat effects on displacement of the tip of the bimorph.

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