Parylene micro check valve and fabrication method thereof

Details Parylene micro check valve and fabrication method thereof Parylene micro check valve and fabrication method thereof

F - Mech Eng,Light,Heat,Weapons

16

K

F16K 15/14 (2006.01) B81B 3/00 (2006.01) F15C 5/00 (2006.01) F16K 1/00 (2006.01) F16K 31/02 (2006.01)

Patent

CA 2350595

The present disclosure describes a Parylene micro check valve (10) including a micromachined silicon valve seat (15) with a roughened top surface to which a membrane cap (20) is anchored by twist-up tethers (25). The micro check valve is found to exhibit low cracking pressure, high reverse pressure, low reverse flow leakage, and negligible membrane-induced flow resistance when used as a valve over a micro orifice through which flow liquid and gas fluids.

La présente invention concerne un micro-clapet anti-retour comprenant un siège en silicium à micro-usinage avec surface supérieure rugueuse sur laquelle un chapeau à membrane est fixée au moyen de torsades. Ce micro-clapet anti-retour présente les caractéristiques suivantes : faible pression d'ouverture, contre-pression élevée, faibles fuites inverses et résistance au débit négligeable due à la membrane lorsque ledit clapet est monté sur un micro-orifice traversé par un liquide ou un gaz.

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