Monolithic high aspect ratio nano-size scanning probe...

Details Monolithic high aspect ratio nano-size scanning probe... Monolithic high aspect ratio nano-size scanning probe...

G - Physics

01

Q

G01Q 70/16 (2010.01) G01Q 70/12 (2010.01) B82Y 40/00 (2011.01) G01Q 70/06 (2010.01)

Patent

CA 2642875

A scanning probe where the micromachined pyramid tip is extended by the growth of an epitaxial nanowire from the top portion of the tip is disclosed. A metallic particle, such as gold, may terminate the nanowire to realize an apertureless near-field optical microscope probe.

La présente invention se rapporte à une sonde de balayage dans laquelle l'extrémité micro-usinée en forme de pyramide est prolongée par la croissance d'un nanofil épitaxial à partir d'une portion supérieure de la pointe. Une particule métallique - comme de l'or, par exemple - peut terminer le nanofil de façon à réaliser une sonde de microscope optique en champ proche sans ouverture.

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