B - Operations – Transporting – 05 – D
Patent
B - Operations, Transporting
05
D
B05D 1/02 (2006.01) B05D 5/12 (2006.01) B05D 7/24 (2006.01) C23C 16/40 (2006.01) C23C 16/448 (2006.01) C23C 16/56 (2006.01) H01L 39/24 (2006.01)
Patent
CA 2048740
RD-20,728 ABSTRACT OF THE INVENTION A method for depositing dense, continuous, and adherent metal oxide films having a uniform composition is disclosed. An aqueous solution of soluble metal nitrate salts is formed, and nebulized into an aerosol of ultrafine droplets. A substrate having a thermal coefficient of expansion compatible with the metal oxide film is heated to about 280° to 320°C. The aerosol is sprayed on the heated substrate at a preselected velocity that overcomes the thermophoretic repulsion from the heated substrate. The aerosol spray is at a density that flash evaporates on the substrate to form a dense, adherent film of a desired composition without inducing cracking in the substrate. The substrate and metal nitrate film deposited thereon are post- heated to a temperature that partially oxidizes the film so that the film adheres to the substrate, about 450° to 550° C.
Company General Electric
Craig Wilson And Company
Deluca John A.
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