Enhanced durability sputtered front surface mirror

G - Physics – 02 – B

Patent

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Details

G02B 5/10 (2006.01) B05D 5/06 (2006.01) C03C 17/36 (2006.01) G02B 1/10 (2006.01) G02B 5/08 (2006.01)

Patent

CA 2096385

Abstract of the Disclosure A durable sputtered front surface mirror comprises a substrate; a reflective aluminum coating formed on one side of the substrate; a silicon oxide coating formed on the aluminum; a titanium oxide coating formed on the silicon oxide; and a thin overcoat formed on the titanium oxide coating. The overcoat is formed using sputter deposition conditions for depositing silicon oxide, silicon nitride, and/or silicon oxynitride, and is formed using process parameters that can be expected to form a very thin coating, which will not degrade the optical qualities of the mirror. Conventional wisdom within the industry is that a coating that is sufficiently thin to preclude optical degradation would be too thin to enhance the surface durability of the titanium oxide outer coating. Surprisingly, I have found that the very thin overcoating results in a very substantial increase in surface durability, typically from less than 20 strokes to more that 10,000 strokes using the military standard, surface durability cheesecloth rub test. My approach is applicable to other optical devices which require durability.

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