Squid formed on a sapphire substrate and method for...

Details Squid formed on a sapphire substrate and method for... Squid formed on a sapphire substrate and method for...

H - Electricity

01

L

H01L 39/12 (2006.01) H01L 39/22 (2006.01) H01L 39/24 (2006.01)

Patent

CA 2266302

The present invention relates to a SQUID made of an oxide superconducting thin film is formed on a sapphire substrate. CeO2 film, RBa2Cu3O7-x film ("R" indicates a rare earth element chosen among a group formed Yb, Er, Ho, Y, Dy, Gd, Eu, Sm and Nd) and SrTiO3 film are deposited the substrate top of sapphire successively. Furthermore, an oxide superconducting thin film to be a SQUID is deposited on the SrTiO3 film.

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