Miniature confocal optical device, system, and method

G - Physics – 02 – B

Patent

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G02B 26/00 (2006.01) G02B 21/00 (2006.01) G02B 26/10 (2006.01)

Patent

CA 2517906

A confocal optical device is described. The device includes a tri-axial scanning mirror that can provide for three-dimensional scanning of objects. In particular, the scanning mirror has a deformable reflective membrane mounted on two annular gimbaled members to provide for rotation about two orthogonal axes. The deformable membrane, which can be provided at other suitable locations in the device, is used to control the focusing spot of the light beam transmitted from the device to the object being scanned. Various methods relating to the confocal optical device are also described.

La présente invention a trait à un dispositif optique confocal. Le dispositif comporte un miroir de balayage triaxial pouvant assurer le balayage tridimensionnel d'objets. Notamment, le miroir de balayage comprend une membrane réfléchissante déformable montée sur deux organes annulaires orientables pour assurer une rotation autour de deux axes orthogonaux. La membrane déformable, qui peut être prévue à des endroits appropriés dans le dispositif, est utilisée pour contrôler le point de focalisation du faisceau lumineux transmis à partir du dispositif vers l'objet en cours de balayage. L'invention a également trait à divers procédés associés au dispositif optique confocal.

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