G - Physics – 01 – N
Patent
G - Physics
01
N
G01N 29/02 (2006.01) C22C 16/00 (2006.01) G01N 29/22 (2006.01) G01N 29/24 (2006.01) G01N 29/30 (2006.01) G01N 33/00 (2006.01)
Patent
CA 2581260
Surface acoustic wave gas sensor, in particular a vacuum or hydrogen sensor, comprising a piezoelectric substrate (1) on which at least one layer of a gas- sensitive material (6) is arranged between two inter-digital transducers (2, 3) and comprises a getter material, so that the molecules sorbed by this getter material can vary the frequency of a signal transmitted between the two transducers (2, 3). The present invention also relates to a process for manufacturing this sensor.
L'invention concerne un capteur de gaz à onde acoustique de surface, en particulier un capteur d'hydrogène ou un capteur de dépression, comprenant un substrat (1) piézoélectrique sur lequel est appliquée au moins une couche de matériau (6) sensible aux gaz intercalée entre deux transducteurs (2, 3) interdigités, et comprenant un getter, de telle manière que les molécules sorbées par le getter produisent une modification de la fréquence d'un signal transmis entre les deux transducteurs (2, 3). La présente invention se rapporte également à un procédé permettant de fabriquer ce capteur.
Gowling Lafleur Henderson Llp
Saes Getters S.p.a.
LandOfFree
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