Precursor polymer for ceramic coatings

Details Precursor polymer for ceramic coatings Precursor polymer for ceramic coatings

C - Chemistry, Metallurgy

08

G

117/110, 402/29,

C08G 77/18 (2006.01) B05D 3/02 (2006.01) C04B 41/50 (2006.01) C04B 41/87 (2006.01) C08G 77/12 (2006.01) C08L 83/06 (2006.01) C09D 183/04 (2006.01) C09D 183/06 (2006.01)

Patent

CA 2035367

PRECURSOR POLYMER FOR CERAMIC COATINGS ABSTRACT This invention relates to a method of hydrolyzing hydridosilanes of the formula HSi(OR)3 to form a soluble resinous hydrolysate comprising a polymer having units of the formula HSi(OH)x(OR)yOz/2, wherein each R is independently an organic group which, when bonded to the silicon through an oxygen atom, forms a hydrolyzable substituent, x = 0-2, y = 0-2, z = 1-3, x + y + z = 3 and the average value of y over all of the units of the polymer is greater than 0. The invention also relates to the soluble hydrolysates formed thereby as well as the method of using said hydrolysates to provide coatings on various substrates, including electronic devices, to form protective layers or inter-level dielectric layers in multilayered devices.

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