Apparatus and method for minimizing drift of a...

Details Apparatus and method for minimizing drift of a... Apparatus and method for minimizing drift of a...

G - Physics

01

L

G01L 9/06 (2006.01)

Patent

CA 2731896

An absolute piezo-resistive pressure sensor system and method employing multiple pressure sensing elements operating simultaneously to detect pressure. Both pressure sensing elements being subject to a common reference pressure within a sealed cavity. The first pressure sensing element detecting an offset voltage resulting from the progressive release of mechanical stress at an assembly interface between the sensing element and a base plate on which the sensing elements are assembled. Electronic circuitry compensates the pressure measured by the second pressure sensing element based on the offset voltage detected by the first pressure sensing element.

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