An apparatus and method for controlling a beam shape

Details An apparatus and method for controlling a beam shape An apparatus and method for controlling a beam shape

H - Electricity

01

J

H01J 37/317 (2006.01) G03F 7/20 (2006.01) H01J 37/302 (2006.01)

Patent

CA 2322778

A converter for lithography which generates signals that control a shaping of an electron (or other energy) beam and which includes a translator that translates shape data into shape and position signals, and translates duration information into a duration signal. The converter also includes a retrograde scan circuit coupled to the translator that provides a retrograde signal that adjusts the position signal to offset a raster scan movement of the beam. The shape signals control the shaping of the beam, the position signal specifies a position of the beam for writing the shape on a substrate, and the duration signal specifies a duration of exposure of the beam on the substrate.

L'invention concerne un convertisseur pour la lithographie, qui génère des signaux commandant la mise en forme d'un faisceau d'électrons (ou d'autre forme d'énergie) et qui comporte un traducteur qui traduit les données de forme en signaux de forme et de position, et traduit les information de durée en signal de durée. Le convertisseur comporte également un circuit de balayage rétrograde couplé au traducteur, qui produit un signal rétrograde qui ajuste le signal de position, de sorte que le mouvement de balayage tramé du faisceau soit décalé. Les signaux de forme commandent la mise en forme du faisceau, le signal de position précise une position du faisceau pour l'écriture de la forme sur le substrat et le signal de durée précise la durée d'exposition du substrat au faisceau.

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