Microvalve for fluid delivery system

Details Microvalve for fluid delivery system Microvalve for fluid delivery system

F - Mech Eng,Light,Heat,Weapons

16

K

F16K 31/126 (2006.01) F16K 39/02 (2006.01) F16K 41/10 (2006.01)

Patent

CA 2154007

A fluid delivery force-actuated valve, such as a gas delivery pneumatic-actuated valve suitable for use in the electronic industry, employing bellows means so that the actuation means can be used to open or close the valve independent of the force of the pressurized fluid. A method for delivering the pressurized fluid, such as gas, is also disclosed.

Vanne de distribution de fluide à commande par pression, comme une vanne de distribution de gaz à commande pneumatique, pouvant être utilisée dans l'industrie électronique. La vanne comprend des soufflets, de sorte que le dispositif d'actionnement peut être utilisé pour ouvrir ou fermer la vanne, indépendamment de la force du fluide sous pression. La présente invention fait également état d'une méthode de distribution de fluide sous pression, comme un gaz.

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