Fabrication technique for the production of devices which...

Details Fabrication technique for the production of devices which... Fabrication technique for the production of devices which...

G - Physics

11

C

356/199, 352/37.

G11C 11/14 (2006.01)

Patent

CA 1153832

- 1 - FABRICATION TECHNIQUE FOR THE PRODUCTION OF DEVICES WHICH DEPEND ON MAGNETIC BUBBLES Abstract Magnetic bubble devices having planar geometry are produced by a particular sequence of processing steps. This sequence of processing steps includes the sequential deposition on a garnet material of an insulating material, an electrically conductive material, a second insulating material, and a material such as permalloy. The upmost layer is then patterned by conventional techniques. The pattern thus produced is used as a mask and the exposed underlying insulating layer is removed. The exposed metal conducting layer is then patterned and etched in a pattern different from that of the permalloy and second insulating layers by a process such as selective plasma etching that does not substantially degrade the exposed dielectric material or the permalloy. The results are a device with layers having planar geometry.

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