Process for producing dielectric-isolated substrate for...

Details Process for producing dielectric-isolated substrate for... Process for producing dielectric-isolated substrate for...

H - Electricity

01

L

356/141

H01L 21/762 (2006.01) C23C 16/02 (2006.01) H01L 21/00 (2006.01) H01L 21/316 (2006.01)

Patent

CA 1015464

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