Tin oxide coatings

Details Tin oxide coatings Tin oxide coatings

H - Electricity

01

L

117/85, 148/3.5

H01L 21/383 (2006.01) C01G 19/02 (2006.01) C03C 17/245 (2006.01) C23C 16/40 (2006.01) H01C 17/14 (2006.01) H01G 9/20 (2006.01) H01J 9/20 (2006.01) H01L 31/18 (2006.01) H01M 14/00 (2006.01) H05B 3/84 (2006.01)

Patent

CA 1121666

ABSTRACT OF THE DISCLOSURE Electrically-conductive films of tin oxide are prepared by a novel process utilizing gaseous chemical compounds which react to form a tin-fluorine bond at a temperature which is (1) high enough so that the newly-created tin-fluorine bond-bearing mole- cule remains in the vapor phase; and (2) low enough so that oxida- tion of the molecule occurs only after the indicated re-arrangement. Films prepared by the process of the invention are characterized by surface resistances as low as 1 ohm per square when the film thickness is as thin as about a micron. These films are also characterized by extremely good reflectance of infrared radiation.

313867

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