Surface relief measuring equipment

Details Surface relief measuring equipment Surface relief measuring equipment

H - Electricity

05

K

33/195, 356/198

H05K 3/00 (2006.01) G01B 7/06 (2006.01) H01L 21/66 (2006.01)

Patent

CA 1143869

SURFACE RELIEF MEASURING EQUIPMENT Abstract of the Disclosure Surface relief analyzing equipment comprises a turntable and an audio frequency pick-up including a stylus. A substrate bearing the surface relief is rotated on the turntable at a fixed frequency and an analogue electrical signal produced at a pick-up transducer is passed through an a-d converter. Digital data is processed to produce an input to a display for registering a pictorial representation of the surface relief. -i-

361296

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