Microdevice substrate and method for making micropattern...

Details Microdevice substrate and method for making micropattern... Microdevice substrate and method for making micropattern...

C - Chemistry, Metallurgy

08

J

195/35

C08J 3/28 (2006.01) G03C 1/93 (2006.01) G03F 7/038 (2006.01) G03F 7/039 (2006.01) G03F 7/11 (2006.01) G06N 3/00 (2006.01) H01L 21/027 (2006.01) H01L 21/312 (2006.01) H05K 3/14 (2006.01)

Patent

CA 1066209

ABSTRACT OF THE DISCLOSURE Articles exhibiting a micropattern carried by a surface of a support, typically microdevices comprising a micropattern of a functional material on or in a substrate of a dissimilar material, are produced by a method employing a micro- substrate comprising a substrate base, a protein layer which comprises at least a compressed monolayer of a denatured non- fibrous protein on the base, and a masking film overlying the protein layer, the material of the masking film being such as to be modified by radiant energy so as to be removable from the protein layer where irradiated. The method is flexible in the sense that it is possible to proceed via either a positive or a negative of the desired micropattern and to build a more extensive, or more complex, micropattern from an initial relatively simple micropattern.

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