4. H - Electricity
  5. 01
  6. H

Kiyohiko Kawano

H - Electricity – 01 – H

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Inventor

Country: Japan

Electrostatically driven latchable actuator system

H - Electricity – 01 – H
Patent

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Process for fabricating a micro-electro-mechanical system...

B - Operations – Transporting – 81 – B
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Profile ID: LFCA-PAI-P-2059511

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