Method for preparing silica glass

C - Chemistry – Metallurgy – 03 – B

Patent

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C03B 19/02 (2006.01) C03B 19/06 (2006.01) C03B 19/12 (2006.01) C03B 20/00 (2006.01) C03B 37/016 (2006.01) C03C 1/00 (2006.01)

Patent

CA 1269250

ABSTRACT This invention relates to a method for preparing a silica glass by the sol-gel method. The silica glass obtained has particular utility as a silicon substrate for a photomask, a preform for an optical fiber, a support tube, a jacket tube, a silicon bar or other optical member. The method involves the steps of (a) preparing a first solution containing fine particle silica by hydrolyzing silicon alkoxide with a basic reagent, (b) preparing a second solution containing fine particle silica by hydrolyzing silicon alkoxide with an acid reagent, (c) mixing said first and second solutions in a predetermined mixing ratio to obtain a sol solution, (d) gelling said sol solution to a wet gel, (e) drying said wet gel to a dry gel, and (f) sintering said dry gel to obtain a glass.

501825

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