Method of simultaneously measuring thickness and composition...

Details Method of simultaneously measuring thickness and composition... Method of simultaneously measuring thickness and composition...

G - Physics

01

B

358/6

G01B 15/02 (2006.01) G01N 23/20 (2006.01) G01N 23/22 (2006.01)

Patent

CA 1320008

ABSTRACT OF THE DISCLOSURE A film as being a subject to be measured is irradiated by an X-ray from a single X-ray source, whereby the intensity of the diffraction X-ray of a crystalline substance contained in the film and the intensity of the fluorescent X-ray of an element composing the film are simultaneously detected by at least two X-ray intensity detectors, respectively. so that the thickness and composition of the film at the same Position are simultaneously determined from the both detected values.

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