Large area microwave plasma apparatus

Details Large area microwave plasma apparatus Large area microwave plasma apparatus

H - Electricity

05

H

327/2.41

H05H 1/24 (2006.01) H01J 37/32 (2006.01) H05H 1/46 (2006.01)

Patent

CA 1317644

1535 ABSTRACT Microwave energy apparatus (10) for sustaining a substantially uniform plasma (20) over a relatively large area. In the broadest form of the invention, an isolating window (60) is disposed about the microwave applicator (40), said isolating window formed from a material through which the microwave energy can be transmitted from the applicator into a plasma reaction vessel (12) and said isolating window configured in a shape which is substantially optimized to withstand compressive forces. In this manner, the thickness of the isolating window may be minimized to provide for rapid thermal cooling, whereby high power densities may be achieved without cracking the window. 019 r

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