H - Electricity – 01 – L
Patent
H - Electricity
01
L
204/96.1
H01L 39/24 (2006.01) C23C 14/34 (2006.01) H01L 39/14 (2006.01)
Patent
CA 1339020
Improvement in a superconducting thin film of compound oxide represented by the formula: LnBa2Cu3O7-? (Ln is lanthanide) or (La1-x.alpha.x)2CuO4 (.alpha. is Ba or Sr) deposited on a substrate or core made of MgO, SrTiO3 or ZrO2 by a physical vapour deposition technique. The present invention is characterized in that the surface roughness Rmax (datum length = 1,000µm) of the superconducting thin film is less than 0.2 µm.
586516
Higaki Kenjiro
Itozaki Hideo
Jodai Tetsuji
Tanaka Saburo
Yazu Shuji
Bereskin & Parr
Sumitomo Electric Industries Ltd.
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