C - Chemistry – Metallurgy – 08 – F
Patent
C - Chemistry, Metallurgy
08
F
C08F 216/10 (2006.01) C08F 212/14 (2006.01) C08F 220/52 (2006.01) C08L 29/00 (2006.01) C08L 33/24 (2006.01) G03F 7/038 (2006.01) G03F 7/039 (2006.01)
Patent
CA 2062096
K-18561/A Copolymers crosslinkable by acid catalysis Abstract Copolymers having a molecular weight (Mw) of from 103 to 106, measured by gel-permeation chromatography, that are crosslinkable by acid catalysis and that consist of a) 100-80 mol.% of structural repeating units of formulae I and II Image Image and (I) (II) in a ratio of from 1:1 to 1:9 and b) 0-20 mol.% of structural repeating units of formula III Image (III) wherein X and X' each independently of the other are -?H-CH2-, -?(CH3)-CH2- or Image , R is hydrogen or a protecting group that can be removed by the action of acids, the radicals R1 each independently of the other are C1-C5alkyl, phenyl or naphthyl or together are 1,2-phenylene or -[C(R3)(R4)]x- wherein R3 and/or R4 = hydrogen or methyl and x is from 2 to 5, the radicals R2 each independently of the other are hydrogen, C1-C5alkyl or C1-C5alkoxy, R5 and R7 are each hydrogen, R6 is hydrogen, halogen or methyl and R8 is hydrogen, halogen, methyl, -CH2halogen, -CH2CN, -CN, -COOH, -CONH2, -O-C1-C5alkyl, -O-CO-C1-C5alkyl, -COO-C1-C5alkyl, -COO-phenyl or phenyl, or R5 and R6 are each hydrogen and R7 and R8 together are -CO-O-CO- or each independently of the other are -COOH or -COO-C1-C5alkyl, are described. The said copolymers are suitable, together with compounds that form an acid under actinic radiation, for the production of negative resist systems.
Ag Ciba-Geigy
Fetherstonhaugh & Co.
Schaedeli Ulrich
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