Process for forming a protection layer for a semiconductor...

Details Process for forming a protection layer for a semiconductor... Process for forming a protection layer for a semiconductor...

H - Electricity

01

S

H01S 5/028 (2006.01)

Patent

CA 2048205

Abstract of the Disclosure There is disclosed a process for forming a protection film for a semiconductor laser by sulfur or selenium-passivating side surfaces of a resonator of a semiconductor laser, and subsequently forming a protection film by ECR-CVD.

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