A method and an apparatus for excitation of a plasma

H - Electricity – 05 – H

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H05H 1/46 (2006.01) H01J 37/32 (2006.01) H05H 1/24 (2006.01) H05H 1/34 (2006.01)

Patent

CA 2426545

A method of exciting a plasma, wherein a gas is subjected to an electrical field generated by means of a plurality of electrodes. One electrode is formed by an outer metal pipe (1). This outer metal pipe (1) surrounds one or more inner metal pipes (2) which form the other electrode. The idea is to turn it to account that plasma is generated in one or more of the inner pipes. These pipes are easier to clean, and the cleaning process is therefore simplified considerably. To this should be added that the distance between the electrodes may now be increased considerably, thereby reducing the risk of breakdown between the electrodes.

L'invention concerne un procédé d'excitation d'un plasma. Un gaz est soumis à un champ électrique généré au moyen de plusieurs électrodes. Une électrode est formée par un tube (1) métallique externe, lequel entoure au moins un tube (2) métallique interne qui forme l'autre électrode. L'invention se caractérise en ce que le plasma est généré dans au moins un tube interne. Il est plus facile de nettoyer ces tubes, ce qui simplifie considérablement le processus de nettoyage. Il convient d'ajouter que la distance entre les électrodes peut donc être augmentée considérablement, ce qui réduit le risque de panne entre les électrodes.

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