H - Electricity – 01 – L
Patent
H - Electricity
01
L
H01L 21/304 (2006.01) H01L 21/306 (2006.01)
Patent
CA 2693135
A method for processing a semiconductor substrate surface and a chemical processing device for the semiconductor substrate surface are provided. A semiconductor substrate is placed above the chemical solution by a holder. A distance exits between the lower surface of the semiconductor substrate and the liquid level of the chemical solution. The chemical solution is sprayed onto the lower surface of the semiconductor substrate by a spray device, thus processing the lower surface of the semiconductor substrate. The device comprises a chemical bath containing a chemical solution, a holder holding the semiconductor substrate above the chemical solution, and a spray device spraying the chemical solution onto the lower surface of the semiconductor substrate. Only one surface of the semiconductor substrate can be processed by this method, without protecting the other surface.
L'invention concerne un procédé de traitement d'une surface de substrat semi-conducteur et un dispositif de traitement chimique pour la surface du substrat semi-conducteur. Un substrat semi-conducteur (4) est placé au-dessus de la solution chimique (5) par un support (2). Une certaine distance existe entre la surface inférieure du substrat semi-conducteur (4) et le niveau de liquide de la solution chimique (5). La solution chimique est pulvérisée sur la surface inférieure du substrat semi-conducteur par un dispositif de pulvérisation (3), traitant ainsi la surface inférieure du substrat semi-conducteur. Le dispositif comprend un bain chimique (1) contenant une solution chimique, un support (2) tenant le substrat semi-conducteur (4) au-dessus de la solution chimique et un dispositif de pulvérisation (3) pulvérisant la solution chimique sur la surface inférieure du substrat semi-conducteur (4). Ce procédé permet de traiter une seule surface du substrat semi-conducteur (4), sans protéger l'autre surface.
Ji Jingjia
Qin Yusen
Shi Zhengrong
Smart & Biggar
Wuxi Suntech Power Co. Ltd
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