C - Chemistry – Metallurgy – 09 – G
Patent
C - Chemistry, Metallurgy
09
G
C09G 1/06 (2006.01) C09G 1/02 (2006.01) C23F 1/16 (2006.01) C23F 3/00 (2006.01) C23F 3/06 (2006.01) H01L 21/321 (2006.01)
Patent
CA 2342332
An abrasive liquid for a metal comprising (1) an oxidizing agent for a metal, (2) a dissolving agent for an oxidized metal, (3) a first protecting film- forming agent such as an amino acid or an azole which adsorbs physically on the surface of the metal and/or forms a chemical bond, to thereby form a protecting film, (4) a second protecting film-forming agent such as polyacrylic acid, polyamido acid or a salt thereof which assists the first protecting film-forming agent in forming a protecting film and (5) water; and a method for polishing.
L'invention se rapporte à un liquide abrasif pour le polissage d'un métal, qui comporte (1) un agent d'oxydation destiné à un métal, (2) un agent dissolvant destiné à un métal oxydé, (3) un premier agent susceptible de former un film protecteur tel qu'un acide aminé ou un azole qui est physiquement adsorbé à la surface du métal et/ou forme une liaison chimique, de manière à créer un film protecteur, (4) un second agent susceptible de former un film protecteur tel qu'un acide polyacrylique, un acide polyamide ou un sel de ces acides, qui facilite la formation d'un film protecteur par le premier agent susceptible de former un film protecteur et (5) de l'eau. L'invention se rapporte également à un procédé de polissage.
Honma Yoshio
Hoshino Tetsuya
Kamigata Yasuo
Kondoh Seiichi
Matsuzawa Jun
Hitachi Ltd.
Hitachi Chemical Company Ltd.
Kirby Eades Gale Baker
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