Accelerometer with re-entrant grooves

Details Accelerometer with re-entrant grooves Accelerometer with re-entrant grooves

G - Physics

01

P

G01P 15/00 (2006.01) G01P 15/08 (2006.01) G01P 15/125 (2006.01) G01V 1/18 (2006.01)

Patent

CA 2410909

An accelerometer (305) which comprises a measurement mass assembly having top capacitor electrode (705), with one or more re-entrant openings or grooves (1405), a bottom capacitor electrode (805), with one or more re-entrant openings (1410), and/or a mass electrode pattern (910, 915), which also includes one or more re-entrant openings or grooves (1415, 1420). A re-entrant opening or groove is an opening or groove formed in an element whereby the opening or groove is larger toward the center of the element than at the surface of the element. Re-entrant openings or grooves (1405, 1410, 1415, 1420) reduce fluid damping thereby reducing the amount of thermo-mechanical noise and permit increased sealing pressure of the accelerometer (305) thereby lowering manufacturing costs and increasing production yields.

L'invention concerne un accéléromètre (305) qui comprend un ensemble masse de mesure comprenant une électrode de condensateur supérieure (705), pourvue d'un ou de plusieurs sillons rentrants (1405), une électrode de condensateur inférieure (805), pourvue d'un ou de plusieurs sillons rentrants (1410) et/ou un motif d'électrodes de masse (910, 915) également pourvu d'un ou de plusieurs sillons rentrants (1415, 1420). Un sillon rentrant est un sillon qui est formé dans un élément et qui est plus grand vers le centre de l'élément qu'à la surface de l'élément. Lesdits sillons rentrants (1405, 1410, 1415, 1420) réduisent l'amortissement par fluide, ce qui permet de réduire le taux de bruit thermo-mécanique, et augmentent la pression de fermeture de l'accéléromètre (305), ce qui permet de faire baisser les coûts de fabrication et d'augmenter les rendements de production.

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