Aluminum nitride heater

Details Aluminum nitride heater Aluminum nitride heater

H - Electricity

05

B

H05B 3/12 (2006.01) H05B 3/14 (2006.01) H05B 3/26 (2006.01)

Patent

CA 2251875

A ceramic heater according to the present invention includes a substrate (1) consisting of an aluminum nitride sintered body, and a heating element (2) and a feed electrode (3), mainly composed of silver or a silver alloy, formed on a surface of the substrate (1). The aluminum nitride sintered body contains a group 2A or 3A element in the periodic table or a compound thereof and silicon or a silicon compound of 0.01 to 0.5 percent by weight in terms of the silicon element, and preferably further contains a group 8 transition element or a compound thereof by 0.01 to 1 percent by weight in terms of the element.

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