Anhydrous, liquid phase process for preparing hydroxyl...

Details Anhydrous, liquid phase process for preparing hydroxyl... Anhydrous, liquid phase process for preparing hydroxyl...

C - Chemistry, Metallurgy

08

F

C08F 6/04 (2006.01) C08F 8/00 (2006.01) C08J 3/09 (2006.01)

Patent

CA 2482899

An anhydrous, liquid phase process for preparing hydroxyl containing polymers of enhanced purity comprising the steps of polymerization, purification, transesterification, purification, catalyst removal, and solvent exchange. The resultant polymer in solution can be used directly, without further processing steps, to prepare a photoresist composition.

L'invention concerne un procédé anhydre en phase liquide permettant de préparer des polymères à pureté améliorée contenant un hydroxyle. Ledit procédé consiste à effectuer une polymérisation, une purification, une transestérification, une purification, une suppression de catalyseur et un échange de solvant. On peut utiliser le polymère résultant en solution directement, sans étapes de traitement ultérieures, afin de préparer une composition de photorésist.

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