Apparatus for and method of forming uniform thin coatings on...

H - Electricity – 05 – H

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H05H 1/26 (2006.01) B41N 3/03 (2006.01) C23C 4/00 (2006.01) C23C 4/12 (2006.01) H05H 1/32 (2006.01) H05H 1/34 (2006.01)

Patent

CA 2197763

A plasma system (80) forms a dense, uniform coating of metallic oxide or other material on a relatively large substrate (94) of metal foil or other compositions located a substantial distance from the plasma gun (84) so that the plasma stream (92) covers the entire width of the substrate (94). A large pressure differential between the pressure inside the plasma gun (84) and the ambient pressure outside of the plasma gun (84) creates a shock pattern within the exiting plasma stream (92) so as to disperse the plasma stream and maintain a high energy level therein, as well as throughly mixing a coating material (96) introduced into the plasma stream (92) within the gun. The plasma stream (92) is delivered in a long, narrow configuration across the width of the substrate by a nozzle with a slit-like opening at the lower end of the plasma gun (84).

Système générateur de plasma (80) permettant de déposer un revêtement dense et uniforme d'oxyde métallique ou d'autres matériaux sur un substrat relativement étendu (94) constitué par une feuille métallique ou d'autre composition placé à une distance importante du canon à plasma pour permettre au flux de plasma de recouvrir toute la largeur du substrat (94). Un fort différentiel de pression entre la pression régnant à l'intérieur du canon (84) et celle régnant à l'éxtérieur du canon crée dans le flux de plasma (92) des ondes de choc qui en assurent la dispersion et y maintiennent un niveau énergétique élevé tout en assurant un mélange parfait du matériau de revêtement (96) introduit dans le flux de plasma (92) à l'intérieur du canon. Le flux de plasma (92) est produit par une tuyère, pourvue d'un orifice en forme de fente placé à la base du canon (84), qui lui confère une configuration longue et étroite orientée selon la largeur du substrat.

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