H - Electricity – 01 – J
Patent
H - Electricity
01
J
356/118, 356/188
H01J 37/256 (2006.01) G01R 31/28 (2006.01) H01J 37/04 (2006.01)
Patent
CA 1256597
AN IMPROVED APPARATUS FOR PULSING ELECTRON BEAMS A B S T R A C T An apparatus for pulsing an electron beam in an electron beam test probe used for examining integrated circuits is disclosed. The apparatus includes a structure having two intersecting channels cut therein. The electron beam passes through a first one of these channels enroute to the integrated circuit being tested. A linear conductor is disposed along the axis of the second channel such that the combination of said conductor and said second channel forms a coaxial transmission line. An electric field is generated in the second channel by applying a suitable potential between the linear conductor and the second channel. This electric field extends into the first channel from the region common to both channels. When a suitable potential is applied between the linear conductor and the second channel, the electric field generated deflects the electrons traveling in the first channel sufficiently to cause said electrons to miss an aperture through which said electrons must pass to reach the circuit being analyzed.
529178
Fairchild Semiconductor Corporation
Smart & Biggar
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