Capacitance based tunable micromechanical resonators

Details Capacitance based tunable micromechanical resonators Capacitance based tunable micromechanical resonators

H - Electricity

03

H

H03H 9/24 (2006.01) H03H 9/02 (2006.01) H03H 9/205 (2006.01) H03H 9/46 (2006.01)

Patent

CA 2224402

A tunable electromechanical resonator structure incorporates an electrostatic actuator (66, 68) which permits reduction or enhancement of the resonant frequency of the structure. The actuator consists of two sets of opposed electrode fingers, each set having a multiplicity of spaced, parallel fingers (70, 72, 84, 90). One set (70, 72) is mounted on a movable portion (54) of the resonator structure and one set (84, 90) is mounted on an adjacent fixed base (132, 134) on the substrate, adjacent ends spaced apart by a gap (86, 92). An adjustable bias voltage (130) across the sets of electrodes adjusts the resonant frequency of the movable structure.

Cette invention concerne une structure de résonateur électromécanique accordable incorporant un actionneur électrostatique (66, 68) qui permet de réduire ou d'augmenter la fréquence de résonance de ladite structure. Cette actionneur est constitué de deux ensembles de dents opposées faisant office d'électrodes, chacun de ces ensembles comportant une multiplicité de dents (70, 72, 84, 90) parallèles et espacées les unes des autres. Un de ces ensembles (70, 72) est monté sur une partie mobile (54) de la structure du résonateur et l'autre ensemble (84, 90) est monté sur une base fixe adjacente (132, 134) placée sur le support, les extrémités adjacentes de ces ensembles étant séparées par un espace (86, 92). Une tension de polarisation (130) ajustable traversant lesdits ensembles d'électrodes permet d'ajuster la fréquence de résonance de la structure mobile.

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