Carbon-based thin film, process for producing the same and...

C - Chemistry – Metallurgy – 23 – C

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C23C 14/00 (2006.01) B82B 1/00 (2006.01) C01B 31/02 (2006.01)

Patent

CA 2556782

A novel carbonaceous material obtained by compositing of carbons with different properties in a form ensuring easy application to devices. There is provided carbonaceous thin film (10) comprising multiple first phases (1) containing amorphous carbon and extending in the direction of film thickness and second phases (2) containing a graphite structure and interposed between multiple first phases (1), wherein at least one selected from among the following requirements (a) to (e) is met: the second phases (2) as compared with those of the first phases (1) contain much graphite structure per volume (a), have large density (b), have low electrical resistance (c), exhibit high elasticity (d), and exhibit orientation of the base plane of graphite structure along the direction of film thickness (e).

Nouveau matériau carboné obtenu par la composition de carbones aux propriétés différentes en une forme garantissant la facilité d'application sur des dispositifs. Film carboné fin (10) comprenant de multiples premières phases (1) contenant du carbone amorphe et s'étendant dans le sens de l'épaisseur du film, et des secondes phases (2) contenant une structure de graphite interposées entre les multiples premières phases (1), où au moins une des conditions suivantes (a) à (e) est remplie : les secondes phases (2), en comparaison avec les premières phases (1), contiennent davantage de structure de graphite par volume (a), ont une forte densité (b), ont une faible résistance électrique (c), sont très élastiques (d), et l'orientation du plan d'appui de la structure de graphite va dans le sens de l'épaisseur du film (e).

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