Carbon target material for forming carbon thin film and...

Details Carbon target material for forming carbon thin film and... Carbon target material for forming carbon thin film and...

C - Chemistry, Metallurgy

01

B

C01B 31/00 (2006.01) C04B 35/524 (2006.01) C23C 14/06 (2006.01) C23C 14/34 (2006.01)

Patent

CA 2143386

Abstract of the Disclosure Disclosed are a carbon target material for forming a carbon thin film, consisting essentially of a vitreous carbon produced from a polycarbodiimide resin; and a process for producing a carbon target material for forming a carbon thin film, which comprises molding into an appropriate shape a polycarbodiimide or a composition mainly comprising a polycarbodiimide and then carbonizing the resulting shaped material. The carbon target material for forming a carbon thin film is free from the problems of the prior art; causes no abnormal discharge and generates no powder leading to contamination, during sputtering; and has a high purity.

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