Cartridge excimer laser system

Details Cartridge excimer laser system Cartridge excimer laser system

H - Electricity

01

S

H01S 3/22 (2006.01) H01S 3/03 (2006.01) H01S 3/223 (2006.01) H01S 3/225 (2006.01)

Patent

CA 2188037

A new cartridge excimer laser system and method for generating an excimer laser beam using the system are provided. The system utilizes a cartridge (10) which contains a halogen-noble gas mixture (19), electrodes (50, 60) having external electrical connections (30, 40), and assembly (20) for transmitting a laser beam output (400), and an external gas port (90). The cartridge (10) fits onto a receptacle (100) located within a receiving compartment (200) of the laser base (300) of the new system. The cartridge (10) is easily replaced by the system operator and is refurbished by the manufacturer when the gas mixture (19) therein is exhausted.

L'invention concerne unn nouveau système laser excimère à cartouche, ainsi qu'un procédé de génération d'un faisceau laser excimère au moyen dudit système. Celui-ci utilise une cartouche (10) contenant un mélange halogène-gaz noble (19), des électrodes (50, 60) possédant des branchements électriques extérieurs (30, 40) et un ensemble (20) servant à émettre une sortie de faisceau laser (400), ainsi qu'un orifice de gaz extérieur (90). La cartouche (10) s'adapte sur un réceptacle (100) situé à l'intérieur d'un compartiment de réception (200) de la base laser (300) du nouveau système. La cartouche (10) peut être remplacée facilement par le technicien du système et refournie par le fabricant quand le mélange de gaz (19) qu'elle contient est épuisé.

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