Charge-coupled device

H - Electricity – 01 – L

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352/82.2

H01L 29/78 (2006.01) H01L 27/148 (2006.01) H01L 29/10 (2006.01) H01L 29/768 (2006.01)

Patent

CA 1278863

ABSTRACT Charge-coupled device. The invention relates to a charge-coupled device comprising two clock electrodes (4,5) which are provided on two opposite sides of the charge transport channel (3) and which extend throughout the length of the charge transport channel. In the charge transport channel, charge storage regions (6-9) are defined zigzagwise on both sides, as a result of which during the charge transport the charge is transferred from one side to the other side. Due to the low parasitic capacitance between the electrodes, the power dissipation is low. Due to the fact that the electrodes can be provided in grooves at the sides of the channel, the surface can be kept free from electrode material. In the case of image sensors, this results in a high sensitivity. Fig. 14.

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