C - Chemistry – Metallurgy – 03 – C
Patent
C - Chemistry, Metallurgy
03
C
C03C 17/34 (2006.01) B32B 17/06 (2006.01) C23C 8/20 (2006.01) C23C 14/08 (2006.01) C23C 14/34 (2006.01) C23C 14/58 (2006.01)
Patent
CA 2518955
A coated article (1) is provided which includes a layer including titanium oxycarbide (3b). In order to form the coated article (1), a layer of titanium oxide (3a) is deposited on a substrate by sputtering or the like. After sputtering of the layer including titanium oxide (3a), an ion beam source(s) (25), is used to implant at least carbon ions into the titanium oxide (3a). When implanting, the carbon ions have sufficient ion energy so as to knock off oxygen (O) from TiOx molecules so as to enable a substantially continuous layer comprising titanium oxycarbide (3b) to form near a surface of the previously sputtered layer.
L'invention concerne un article revêtu comprenant une couche renfermant de l'oxycarbure de titane. En vue de former l'article revêtu précité, une couche d'oxyde de titane est déposée sur un substrat, par pulvérisation ou analogue. Après pulvérisation de la couche renfermant l'oxyde de titane, une ou plusieurs sources de faisceaux ioniques sont utilisées pour implanter au moins des ions carbone dans l'oxyde de titane. Lors de l'implantation, les ions carbone ont une énergie ionique suffisante pour faire partir l'oxygène (O) des molécules de TiO¿x?, de telle façon qu'une couche sensiblement continue d'oxycarbure de titane puisse se former à proximité d'une surface de la couche précédemment pulvérisée.
Petrmichl Rudolph Hugo
Thomsen Scott V.
Veerasamy Vijayen S.
Guardian Industries Corp.
Macpherson Leslie & Tyerman Llp
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