Coating process using alkoxy substituted silicon- bearing...

C - Chemistry – Metallurgy – 03 – C

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C03C 17/245 (2006.01) C23C 16/40 (2006.01)

Patent

CA 1200444

ABSTRACT OF THE SPECIFICATION An improved process for chemical vapor deposition of coatings of the type bearing silicon oxide or silicon oxide/tin oxide mixtures. The process involves the use of mono or dialkoxy terminated permethylpolys- ilanes, preferably monomethoxypentamethyldisilane, as a silicon-donating reactant. Also disclosed are novel transparent silicon-bearing coating compositions which can be formed by the improved process to have any desired refractive index value from about 1.44 to about 2Ø

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