Composite oxide thin film

Details Composite oxide thin film Composite oxide thin film

C - Chemistry, Metallurgy

25

D

204/24.95

C25D 9/06 (2006.01) C25D 11/00 (2006.01) C25D 11/02 (2006.01)

Patent

CA 2020856

A composite oxide thin film is manufactured by a method comprising the steps of (i) providing a work electrode and an opposite electrode immersed in an electrolytic solution, the work electrode comprising a first metal and the electrolytic solution comprising at least one reactive component which is reactive with the work electrode and contains ions of at least one metal other than the first metal in the work electrode; and (ii) energizing the work electrode at a solution temperature of at least 100°C. and under a pressure of at least saturated vapor pressure of the solution, thereby reacting the reactive component with the work electrode and forming a composite oxide thin film which contains oxides of the first metal and the metal other than the first metal. The method of the invention enables one to obtain a uniform composite oxide thin film having an excellent crystallinity directly at a relatively low temperature. A large-area thin film can thus easily be manufatured.

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