Contamination suppression in chemical fluid deposition

Details Contamination suppression in chemical fluid deposition Contamination suppression in chemical fluid deposition

H - Electricity

01

L

H01L 21/31 (2006.01) C23C 18/08 (2006.01) H01L 21/285 (2006.01) H01L 21/44 (2006.01) H01L 21/469 (2006.01)

Patent

CA 2471596

Methods for depositing materials onto a substrate surface or into a porous solid are disclosed. These methods include suppressing contamination of the deposited materials.

L'invention concerne de procédés destinés à déposer des matières sur une surface de substrat ou dans un solide poreux. Ces procédés consistent à supprimer la contamination des matériaux déposés.

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