Densification of substrates arranged in ring-shaped stacks...

Details Densification of substrates arranged in ring-shaped stacks... Densification of substrates arranged in ring-shaped stacks...

C - Chemistry, Metallurgy

04

B

C04B 35/83 (2006.01) C04B 35/80 (2006.01) C23C 16/04 (2006.01) C23C 16/26 (2006.01) C23C 16/44 (2006.01) C23C 16/46 (2006.01) F16D 69/02 (2006.01) F16D 65/12 (2006.01)

Patent

CA 2268729

The substrates (10) to be densified are arranged in at least one ring-shaped stack (20) which delimits an internal passage (26) with spaces provided between the substrates. The substrates are non-uniformly heated by establishing a temperature gradient within each substrate, for example by direct inductive coupling, such that parts of the substrates distant from their surfaces exposed to the gas phase have a temperature higher than that of the exposed surfaces. A gas phase containing at least one precursor of the material to be deposited is channelled into the reaction chamber (30) towards one of the two volumes constituted by the inside and the outside of the stack of substrates, at its end closest to the first longitudinal end of the chamber, the volume (26) in which the gas phase is channelled being closed at its end furthest from the first longitudinal end of the chamber.

Les substrats (10) à densifier sont disposés en au moins une pile (20) annulaire qui délimite un passage intérieur (26) avec des espaces ménagés entre des substrats. Les substrats sont chauffés de façon non uniforme par établissement d'un gradient de température au sein de chaque substrat, par exemple par couplage inductif direct, de sorte que des parties des substrats éloignées de leurs surfaces exposées à la phase gazeuse admise aient une température supérieure à celle des surfaces exposées. Une phase gazeuse contenant au moins un précurseur du matériau à déposer est canalisée dans la chambre de réaction (30) vers l'un des deux volumes constitués par l'intérieur et l'extérieur de la pile de substrats, à son extrémité la plus proche d'une première extrémité longitudinale de la chambre, le volume (26) dans lequel la phase gazeuse est canalisée étant fermé à son extrémité la plus éloignée de la première extrémité longitudinale de la chambre.

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