Depositing different materials on a substrate

Details Depositing different materials on a substrate Depositing different materials on a substrate

C - Chemistry, Metallurgy

23

C

C23C 14/04 (2006.01) C23C 14/00 (2006.01) C23C 14/46 (2006.01) C23C 14/56 (2006.01)

Patent

CA 2110250

An apparatus and method for depositing different materials on a substrate 9 comprising means, 5,6,7 for moving the substrate 9 between regions, means 3,4 for depositing different materials on the substrate 9 in the respective regions, means 12 for introducing a reactive substance into each region so as to expose the material as it is deposited in that region, to the reactive substance; and means 13, 14, 15 for controlling the degree of such exposure in one region relative to the other to obtain desired stoichiometry in the deposited material (Figure 1).

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