Determination of refractive index and thickness of thin layers

Details Determination of refractive index and thickness of thin layers Determination of refractive index and thickness of thin layers

G - Physics

01

B

33/50, 73/58

G01B 11/06 (2006.01) G01N 21/41 (2006.01)

Patent

CA 2012598

- 8 - O.Z. 0050/40663 Abstract of the Disclosure: The refractive index and thickness of ultrathin layers < 1 µm in thickness are determined by recording the layers, which have been applied to a solid support, by surface plasmon micro- scopy as a function of the angle of incidence of the incident laser beam, the method making it possible to determine layer thicknesses with a vertical resolution ? 0.1 nm and a simultaneous lateral resolution ? 5 µm.

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